Hf precursor TDEAH (Hf(NEt2)4) - Revision history

Leviathan: /* Chemical reaction */

2022-10-12T14:37:04Z

Chemical reaction

← Older revision		Revision as of 14:37, 12 October 2022
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	==Chemical reaction==		==Chemical reaction==

			We combine lithium diethylamide (Et<sub>2</sub>NLi) with Hafnium tetrachloride (HfCl<sub>4</sub>), using a Schlenker tube setup.

	With a temperature of 117°C and a pressure of 0.04 torr the following reaction will occur within an inert atmosphere (Argon/Nitrogen):		With a temperature of 117°C and a pressure of 0.04 torr the following reaction will occur within an inert atmosphere (Argon/Nitrogen):

2022-10-12T14:21:38Z

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 The base of this chemical recipe and processing is Hafnium-Tetrachloride, as it can be seen in the picture.
 [[File:High-Quality-Hafnium-Chloride-Hafnium-Tetrachloride-Hfcl4-CAS-No-13499-05-3-with-Best-Price.jpg|200px|Hafnium-Tetrachloride]]
 [[File:34591.png|200px|left]]
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 The result of those chemical reactions is a crystalline powder with a melting point of 432&nbsp;°C
 You might notice that Hafnium-Tetrachloride is a solid crystal at room temperature, which is kind of a problem considering that we wanna use it as a vapor in our CVD furnace, in order to react it with oxide for obtaining a Hafnium-Oxide thin film layer.
 ==Atmospheric requirements==

2022-10-12T14:20:38Z

← Older revision		Revision as of 14:20, 12 October 2022
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	The base of this chemical recipe and processing is Hafnium-Tetrachloride, as it can be seen in the picture.		The base of this chemical recipe and processing is Hafnium-Tetrachloride, as it can be seen in the picture.

			[[File:High-Quality-Hafnium-Chloride-Hafnium-Tetrachloride-Hfcl4-CAS-No-13499-05-3-with-Best-Price.jpg\|200px\|Hafnium-Tetrachloride]]

	===Chemical properties of Hafnium-Tetrachloride===		===Chemical properties of Hafnium-Tetrachloride===
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	The result of those chemical reactions is a crystalline powder with a melting point of 432 °C		The result of those chemical reactions is a crystalline powder with a melting point of 432 °C

	~~[[File:High-Quality-Hafnium-Chloride-Hafnium-Tetrachloride-Hfcl4-CAS-No-13499-05-3-with-Best-Price.jpg\|200px\|Hafnium-Tetrachloride]]~~

	You might notice that Hafnium-Tetrachloride is a solid crystal at room temperature, which is kind of a problem considering that we wanna use it as a vapor in our CVD furnace, in order to react it with oxide for obtaining a Hafnium-Oxide thin film layer.		You might notice that Hafnium-Tetrachloride is a solid crystal at room temperature, which is kind of a problem considering that we wanna use it as a vapor in our CVD furnace, in order to react it with oxide for obtaining a Hafnium-Oxide thin film layer.

2022-10-12T14:20:17Z

← Older revision		Revision as of 14:20, 12 October 2022
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	The base of this chemical recipe and processing is Hafnium-Tetrachloride, as it can be seen in the picture.		The base of this chemical recipe and processing is Hafnium-Tetrachloride, as it can be seen in the picture.

			===Chemical properties of Hafnium-Tetrachloride===

			[[File:34591.png\|200px\|left]]


			HfCl<sub>4</sub> can be produced by several related procedures:
			*The reaction of carbon tetrachloride and hafnium oxide at above 450 °C;
			:HfO<sub>2</sub> + 2 CCl<sub>4</sub> → HfCl<sub>4</sub> + 2 COCl<sub>2</sub>
			*Chlorination of a mixture of HfO<sub>2</sub> and carbon above 600 °C using chlorine gas or sulfur monochloride:
			:HfO<sub>2</sub> + 2 Cl<sub>2</sub> + C → HfCl<sub>4</sub> + CO<sub>2</sub>
			*Chlorination of hafnium carbide above 250 °C.

			The result of those chemical reactions is a crystalline powder with a melting point of 432 °C

	[[File:High-Quality-Hafnium-Chloride-Hafnium-Tetrachloride-Hfcl4-CAS-No-13499-05-3-with-Best-Price.jpg\|200px\|Hafnium-Tetrachloride]]		[[File:High-Quality-Hafnium-Chloride-Hafnium-Tetrachloride-Hfcl4-CAS-No-13499-05-3-with-Best-Price.jpg\|200px\|Hafnium-Tetrachloride]]

2022-10-12T14:19:22Z

← Older revision		Revision as of 14:19, 12 October 2022
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	[[File:High-Quality-Hafnium-Chloride-Hafnium-Tetrachloride-Hfcl4-CAS-No-13499-05-3-with-Best-Price.jpg\|200px\|Hafnium-Tetrachloride]]		[[File:High-Quality-Hafnium-Chloride-Hafnium-Tetrachloride-Hfcl4-CAS-No-13499-05-3-with-Best-Price.jpg\|200px\|Hafnium-Tetrachloride]]

			You might notice that Hafnium-Tetrachloride is a solid crystal at room temperature, which is kind of a problem considering that we wanna use it as a vapor in our CVD furnace, in order to react it with oxide for obtaining a Hafnium-Oxide thin film layer.

	This is the structure of the organic precursor for Hafnium oxide deposition in a CVD ([[Hafnium_oxide_deposition_(CVD)]])		This is the structure of the organic precursor for Hafnium oxide deposition in a CVD ([[Hafnium_oxide_deposition_(CVD)]])

2022-10-12T14:18:38Z

← Older revision		Revision as of 14:18, 12 October 2022
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			The base of this chemical recipe and processing is Hafnium-Tetrachloride, as it can be seen in the picture.

			[[File:High-Quality-Hafnium-Chloride-Hafnium-Tetrachloride-Hfcl4-CAS-No-13499-05-3-with-Best-Price.jpg\|200px\|Hafnium-Tetrachloride]]

	This is the structure of the organic precursor for Hafnium oxide deposition in a CVD ([[Hafnium_oxide_deposition_(CVD)]])		This is the structure of the organic precursor for Hafnium oxide deposition in a CVD ([[Hafnium_oxide_deposition_(CVD)]])

2022-10-12T13:51:00Z

Chemical reaction

← Older revision		Revision as of 13:51, 12 October 2022
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	==Chemical reaction==		==Chemical reaction==

			With a temperature of 117°C and a pressure of 0.04 torr the following reaction will occur within an inert atmosphere (Argon/Nitrogen):

	HfCl<sub>4</sub> + Et<sub>2</sub>NLi		HfCl<sub>4</sub> + Et<sub>2</sub>NLi
	→		→
	TDEAH (Hf(NEt<sub>2</sub>)<sub>4</sub>)		TDEAH (Hf(NEt<sub>2</sub>)<sub>4</sub>)

			The yield typically is around 60%

			The waste products will be some carbon hydrates (not the stuff in white bread)

2022-10-12T13:48:59Z

Chemical reaction

2022-10-12T13:48:49Z

Chemical reaction

2022-10-12T13:48:38Z

← Older revision		Revision as of 13:48, 12 October 2022
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	==Atmospheric requirements==		==Atmospheric requirements==
	Since this mixture and its components react with oxygen and humidity, we need to use a Schlenk tube setup for mixing it, because we can only do it in an inert atmosphere.		Since this mixture and its components react with oxygen and humidity, we need to use a Schlenk tube setup for mixing it, because we can only do it in an inert atmosphere.

			==Chemical reaction==

			HfCl<sub>4</sub> + Et<sub>2</sub>NLi

			TDEAH (Hf(NEt<sub>2</sub>)<sub>4</sub>)