LibreSilicon 1µm CMOS Process Flow (HKUST NFF) - Revision history

Leviathan: Integrated TikZ renderer is broken in newest MediaWiki

2025-11-06T16:21:52Z

Integrated TikZ renderer is broken in newest MediaWiki

← Older revision		Revision as of 16:21, 6 November 2025
Line 27:		Line 27:
	== Process Flowchart ==		== Process Flowchart ==
	The overall manufacturing process is a sequence of layering, patterning, and doping steps. Below is the flowchart.		The overall manufacturing process is a sequence of layering, patterning, and doping steps. Below is the flowchart.
			[[File:LS1U flow.png\|none\|thumb]]


	=== Step 1: Initial Alignment ===		=== Step 1: Initial Alignment ===

Leviathan at 16:13, 6 November 2025

2025-11-06T16:13:17Z

← Older revision		Revision as of 16:13, 6 November 2025
Line 28:		Line 28:
	The overall manufacturing process is a sequence of layering, patterning, and doping steps. Below is the flowchart.		The overall manufacturing process is a sequence of layering, patterning, and doping steps. Below is the flowchart.

	~~<PGFTikZ>~~
	~~[[File:My_image_1.png\|400px\|test image]]~~

	~~<PGFTikZPreamble>~~
	~~\usepackage{tikz}~~
	~~\usetikzlibrary[shapes,arrows,positioning]~~
	~~</PGFTikZPreamble>~~

	~~\begin{tikzpicture}[scale=.8,every node/.style={minimum size=1cm}]~~
	~~% Define block styles~~
	~~\tikzset{~~
	~~startstop/.style={rectangle, rounded corners, minimum width=4cm, minimum height=1cm, text centered, draw=black, fill=green!30},~~
	~~process/.style={rectangle, minimum width=4cm, text width=6cm, minimum height=1cm, text centered, draw=black, fill=blue!20},~~
	~~arrow/.style={thick,->,>=stealth}~~
	}

	~~% Place nodes~~
	~~\node (start) [startstop] {\textbf{Wafer Start} (P-type Silicon Substrate)};~~
	~~\node (step1) [process, below=of start] {\textbf{1. Initial Alignment} (Mask: \textit{basic})};~~
	~~\node (step2) [process, below=of step1] {\textbf{2. Shallow Trench Isolation (STI)} (Mask: \textit{sti})};~~
	~~\node (step3) [process, below=of step2] {\textbf{3. N-Well Formation} (Mask: \textit{nwell})};~~
	~~\node (step4) [process, below=of step3] {\textbf{4. P-Well Formation} (Mask: \textit{pwell})};~~
	~~\node (step5) [process, below=of step4] {\textbf{5. P-Base Implant} (Mask: \textit{pbase})};~~
	~~\node (step6) [process, below=of step5] {\textbf{6. N-Base Implant} (Mask: \textit{nbase})};~~
	~~\node (step7) [process, below=of step6] {\textbf{7. Field Oxide} (Mask: \textit{fox})};~~
	~~\node (step8) [process, below=of step7] {\textbf{8. SONOS Flash Cell Formation} (Mask: \textit{sonos})};~~
	~~\node (step9) [process, below=of step8] {\textbf{9. Gate Formation} (Mask: \textit{poly})};~~
	~~\node (step10) [process, below=of step9] {\textbf{10. Implant Stop Layer} (Mask: \textit{implantstop})};~~
	~~\node (step11) [process, below=of step10] {\textbf{11. N+ Source/Drain Implant} (Mask: \textit{nimplant})};~~
	~~\node (step12) [process, below=of step11] {\textbf{12. P+ Source/Drain Implant} (Mask: \textit{pimplant})};~~
	~~\node (step13) [process, below=of step12] {\textbf{13. Silicidation} (Mask: \textit{silicideblock})};~~
	~~\node (step14) [process, below=of step13] {\textbf{14. Contact Layer} (Mask: \textit{contact})};~~
	~~\node (step15) [process, below=of step14] {\textbf{15. Metal 1 Layer} (Mask: \textit{metal1})};~~
	~~\node (step16) [process, below=of step15] {\textbf{16. Via 1 Layer} (Mask: \textit{via1})};~~
	~~\node (step17) [process, below=of step16] {\textbf{17. Metal 2 Layer} (Mask: \textit{metal2})};~~
	~~\node (step18) [process, below=of step17] {\textbf{18. Via 2 Layer} (Mask: \textit{via2})};~~
	~~\node (step19) [process, below=of step18] {\textbf{19. Metal 3 Layer} (Mask: \textit{metal3})};~~
	~~\node (step20) [process, below=of step19] {\textbf{20. Passivation (Glass)} (Mask: \textit{glass})};~~
	~~\node (end) [startstop, below=of step20] {\textbf{Process End}};~~

	~~% Draw arrows~~
	~~\draw [arrow] (start) -- (step1);~~
	~~\draw [arrow] (step1) -- (step2);~~
	~~\draw [arrow] (step2) -- (step3);~~
	~~\draw [arrow] (step3) -- (step4);~~
	~~\draw [arrow] (step4) -- (step5);~~
	~~\draw [arrow] (step5) -- (step6);~~
	~~\draw [arrow] (step6) -- (step7);~~
	~~\draw [arrow] (step7) -- (step8);~~
	~~\draw [arrow] (step8) -- (step9);~~
	~~\draw [arrow] (step9) -- (step10);~~
	~~\draw [arrow] (step10) -- (step11);~~
	~~\draw [arrow] (step11) -- (step12);~~
	~~\draw [arrow] (step12) -- (step13);~~
	~~\draw [arrow] (step13) -- (step14);~~
	~~\draw [arrow] (step14) -- (step15);~~
	~~\draw [arrow] (step15) -- (step16);~~
	~~\draw [arrow] (step16) -- (step17);~~
	~~\draw [arrow] (step17) -- (step18);~~
	~~\draw [arrow] (step18) -- (step19);~~
	~~\draw [arrow] (step19) -- (step20);~~
	~~\draw [arrow] (step20) -- (end);~~
	~~\end{tikzpicture}~~
	~~</PGFTikZ>~~

	=== Step 1: Initial Alignment ===		=== Step 1: Initial Alignment ===

Leviathan: /* Process Flowchart */

2025-09-26T14:58:45Z

Process Flowchart

← Older revision		Revision as of 14:58, 26 September 2025
Line 26:		Line 26:

	== Process Flowchart ==		== Process Flowchart ==
	The overall manufacturing process is a sequence of layering, patterning, and doping steps. Below is the ~~TikZ code for generating a graphical~~ flowchart. ~~''(Note: Requires a MediaWiki extension capable of rendering TikZ.)''~~		The overall manufacturing process is a sequence of layering, patterning, and doping steps. Below is the flowchart.

	<PGFTikZ>		<PGFTikZ>

Leviathan: /* Process Flowchart */

2025-09-26T14:48:35Z

Process Flowchart

← Older revision		Revision as of 14:48, 26 September 2025
Line 32:		Line 32:

	<PGFTikZPreamble>		<PGFTikZPreamble>
	~~\documentclass{scrartcl}~~
	\usepackage{tikz}		\usepackage{tikz}
	\usetikzlibrary[shapes,arrows,positioning]		\usetikzlibrary[shapes,arrows,positioning]

Leviathan: /* Process Flowchart */

2025-09-26T14:44:59Z

Process Flowchart

← Older revision		Revision as of 14:44, 26 September 2025
Line 32:		Line 32:

	<PGFTikZPreamble>		<PGFTikZPreamble>
			\documentclass{scrartcl}
	\usepackage{tikz}		\usepackage{tikz}
	\usetikzlibrary[shapes,arrows,positioning]		\usetikzlibrary[shapes,arrows,positioning]

Leviathan: /* Process Flowchart */

2025-09-26T14:41:22Z

Process Flowchart

← Older revision		Revision as of 14:41, 26 September 2025
Line 36:		Line 36:
	</PGFTikZPreamble>		</PGFTikZPreamble>

	\begin{tikzpicture}[~~node distance~~=0.~~7cm~~, ~~auto~~]		\begin{tikzpicture}[scale=.8,every node/.style={minimum size=1cm}]
	% Define block styles		% Define block styles
	\tikzset{		\tikzset{

Leviathan: /* Process Flowchart */

2025-09-26T14:40:45Z

Process Flowchart

← Older revision		Revision as of 14:40, 26 September 2025
Line 37:		Line 37:

	\begin{tikzpicture}[node distance=0.7cm, auto]		\begin{tikzpicture}[node distance=0.7cm, auto]

	% Define block styles		% Define block styles
	\tikzset{		\tikzset{
Line 44:		Line 43:
	arrow/.style={thick,->,>=stealth}		arrow/.style={thick,->,>=stealth}
	}		}

	% Place nodes		% Place nodes
	\node (start) [startstop] {\textbf{Wafer Start} (P-type Silicon Substrate)};		\node (start) [startstop] {\textbf{Wafer Start} (P-type Silicon Substrate)};

Leviathan: /* Process Flowchart */

2025-09-26T14:40:02Z

Process Flowchart

← Older revision		Revision as of 14:40, 26 September 2025
Line 33:		Line 33:
	<PGFTikZPreamble>		<PGFTikZPreamble>
	\usepackage{tikz}		\usepackage{tikz}
			\usetikzlibrary[shapes,arrows,positioning]
	</PGFTikZPreamble>		</PGFTikZPreamble>

	\begin{tikzpicture}[node distance=0.7cm, auto]		\begin{tikzpicture}[node distance=0.7cm, auto]

	~~\usetikzlibrary[shapes,arrows,positioning]~~

	% Define block styles		% Define block styles

Leviathan: /* Process Flowchart */

2025-09-26T14:39:29Z

Process Flowchart

← Older revision		Revision as of 14:39, 26 September 2025
Line 33:		Line 33:
	<PGFTikZPreamble>		<PGFTikZPreamble>
	\usepackage{tikz}		\usepackage{tikz}
	~~\usetikzlibrary{arrows}~~
	~~\usetikzlibrary{intersections}~~
	~~\usetikzlibrary{calc}~~
	</PGFTikZPreamble>		</PGFTikZPreamble>

	\begin{tikzpicture}[node distance=0.7cm, auto]		\begin{tikzpicture}[node distance=0.7cm, auto]

	\usetikzlibrary[shapes,arrows,positioning]		\usetikzlibrary[shapes,arrows,positioning]

Leviathan: /* Process Flowchart */

2025-09-26T14:38:59Z

Process Flowchart

← Older revision		Revision as of 14:38, 26 September 2025
Line 39:		Line 39:

	\begin{tikzpicture}[node distance=0.7cm, auto]		\begin{tikzpicture}[node distance=0.7cm, auto]
	~~% Define block styles~~		\usetikzlibrary[shapes,arrows,positioning]
	\~~tikzstyle{startstop} =~~ [~~rectangle~~, ~~rounded corners~~, ~~minimum width=4cm, minimum height=1cm, text centered, draw=black, fill=green!30]~~
	~~\tikzstyle{process} = [rectangle, minimum width=4cm, text width=6cm, minimum height=1cm, text centered, draw=black, fill=blue!20]~~
	~~\tikzstyle{arrow} = [thick,->,>=stealth~~]

	% Place nodes		% Define block styles
	\node (start) [startstop] {~~'''~~Wafer Start~~'''~~ (P-type Silicon Substrate)};		\tikzset{
	\node (step1) [process, below=of start] {~~'''~~1. Initial Alignment~~'''~~ (Mask: ''basic'')};		startstop/.style={rectangle, rounded corners, minimum width=4cm, minimum height=1cm, text centered, draw=black, fill=green!30},
	\node (step2) [process, below=of step1] {~~'''~~2. Shallow Trench Isolation (STI)~~'''~~ (Mask: ''sti'')};		process/.style={rectangle, minimum width=4cm, text width=6cm, minimum height=1cm, text centered, draw=black, fill=blue!20},
	\node (step3) [process, below=of step2] {~~'''~~3. N-Well Formation~~'''~~ (Mask: ''nwell'')};		arrow/.style={thick,->,>=stealth}
	\node (step4) [process, below=of step3] {~~'''~~4. P-Well Formation~~'''~~ (Mask: ''pwell'')};		}
	\node (step5) [process, below=of step4] {~~'''~~5. P-Base Implant~~'''~~ (Mask: ''pbase'')};
	\node (step6) [process, below=of step5] {~~'''~~6. N-Base Implant~~'''~~ (Mask: ''nbase'')};		% Place nodes
	\node (step7) [process, below=of step6] {~~'''~~7. Field Oxide~~'''~~ (Mask: ''fox'')};		\node (start) [startstop] {\textbf{Wafer Start} (P-type Silicon Substrate)};
	\node (step8) [process, below=of step7] {~~'''~~8. SONOS Flash Cell Formation~~'''~~ (Mask: ''sonos'')};		\node (step1) [process, below=of start] {\textbf{1. Initial Alignment} (Mask: \textit{basic})};
	\node (step9) [process, below=of step8] {~~'''~~9. Gate Formation~~'''~~ (Mask: ''poly'')};		\node (step2) [process, below=of step1] {\textbf{2. Shallow Trench Isolation (STI)} (Mask: \textit{sti})};
	\node (step10) [process, below=of step9] {~~'''~~10. Implant Stop Layer~~'''~~ (Mask: ''implantstop'')};		\node (step3) [process, below=of step2] {\textbf{3. N-Well Formation} (Mask: \textit{nwell})};
	\node (step11) [process, below=of step10] {~~'''~~11. N+ Source/Drain Implant~~'''~~ (Mask: ''nimplant'')};		\node (step4) [process, below=of step3] {\textbf{4. P-Well Formation} (Mask: \textit{pwell})};
	\node (step12) [process, below=of step11] {~~'''~~12. P+ Source/Drain Implant~~'''~~ (Mask: ''pimplant'')};		\node (step5) [process, below=of step4] {\textbf{5. P-Base Implant} (Mask: \textit{pbase})};
	\node (step13) [process, below=of step12] {~~'''~~13. Silicidation~~'''~~ (Mask: ''silicideblock'')};		\node (step6) [process, below=of step5] {\textbf{6. N-Base Implant} (Mask: \textit{nbase})};
	\node (step14) [process, below=of step13] {~~'''~~14. Contact Layer~~'''~~ (Mask: ''contact'')};		\node (step7) [process, below=of step6] {\textbf{7. Field Oxide} (Mask: \textit{fox})};
	\node (step15) [process, below=of step14] {~~'''~~15. Metal 1 Layer~~'''~~ (Mask: ''metal1'')};		\node (step8) [process, below=of step7] {\textbf{8. SONOS Flash Cell Formation} (Mask: \textit{sonos})};
	\node (step16) [process, below=of step15] {~~'''~~16. Via 1 Layer~~'''~~ (Mask: ''via1'')};		\node (step9) [process, below=of step8] {\textbf{9. Gate Formation} (Mask: \textit{poly})};
	\node (step17) [process, below=of step16] {~~'''~~17. Metal 2 Layer~~'''~~ (Mask: ''metal2'')};		\node (step10) [process, below=of step9] {\textbf{10. Implant Stop Layer} (Mask: \textit{implantstop})};
	\node (step18) [process, below=of step17] {~~'''~~18. Via 2 Layer~~'''~~ (Mask: ''via2'')};		\node (step11) [process, below=of step10] {\textbf{11. N+ Source/Drain Implant} (Mask: \textit{nimplant})};
	\node (step19) [process, below=of step18] {~~'''~~19. Metal 3 Layer~~'''~~ (Mask: ''metal3'')};		\node (step12) [process, below=of step11] {\textbf{12. P+ Source/Drain Implant} (Mask: \textit{pimplant})};
	\node (step20) [process, below=of step19] {~~'''~~20. Passivation (Glass)~~'''~~ (Mask: ''glass'')};		\node (step13) [process, below=of step12] {\textbf{13. Silicidation} (Mask: \textit{silicideblock})};
	\node (end) [startstop, below=of step20] {~~'''~~Process End~~'''~~};		\node (step14) [process, below=of step13] {\textbf{14. Contact Layer} (Mask: \textit{contact})};
			\node (step15) [process, below=of step14] {\textbf{15. Metal 1 Layer} (Mask: \textit{metal1})};
	% Draw arrows		\node (step16) [process, below=of step15] {\textbf{16. Via 1 Layer} (Mask: \textit{via1})};
	\draw [arrow] (start) -- (step1);		\node (step17) [process, below=of step16] {\textbf{17. Metal 2 Layer} (Mask: \textit{metal2})};
	\draw [arrow] (step1) -- (step2);		\node (step18) [process, below=of step17] {\textbf{18. Via 2 Layer} (Mask: \textit{via2})};
	\draw [arrow] (step2) -- (step3);		\node (step19) [process, below=of step18] {\textbf{19. Metal 3 Layer} (Mask: \textit{metal3})};
	\draw [arrow] (step3) -- (step4);		\node (step20) [process, below=of step19] {\textbf{20. Passivation (Glass)} (Mask: \textit{glass})};
	\draw [arrow] (step4) -- (step5);		\node (end) [startstop, below=of step20] {\textbf{Process End}};
	\draw [arrow] (step5) -- (step6);
	\draw [arrow] (step6) -- (step7);		% Draw arrows
	\draw [arrow] (step7) -- (step8);		\draw [arrow] (start) -- (step1);
	\draw [arrow] (step8) -- (step9);		\draw [arrow] (step1) -- (step2);
	\draw [arrow] (step9) -- (step10);		\draw [arrow] (step2) -- (step3);
	\draw [arrow] (step10) -- (step11);		\draw [arrow] (step3) -- (step4);
	\draw [arrow] (step11) -- (step12);		\draw [arrow] (step4) -- (step5);
	\draw [arrow] (step12) -- (step13);		\draw [arrow] (step5) -- (step6);
	\draw [arrow] (step13) -- (step14);		\draw [arrow] (step6) -- (step7);
	\draw [arrow] (step14) -- (step15);		\draw [arrow] (step7) -- (step8);
	\draw [arrow] (step15) -- (step16);		\draw [arrow] (step8) -- (step9);
	\draw [arrow] (step16) -- (step17);		\draw [arrow] (step9) -- (step10);
	\draw [arrow] (step17) -- (step18);		\draw [arrow] (step10) -- (step11);
	\draw [arrow] (step18) -- (step19);		\draw [arrow] (step11) -- (step12);
	\draw [arrow] (step19) -- (step20);		\draw [arrow] (step12) -- (step13);
	\draw [arrow] (step20) -- (end);		\draw [arrow] (step13) -- (step14);
			\draw [arrow] (step14) -- (step15);
			\draw [arrow] (step15) -- (step16);
			\draw [arrow] (step16) -- (step17);
			\draw [arrow] (step17) -- (step18);
			\draw [arrow] (step18) -- (step19);
			\draw [arrow] (step19) -- (step20);
			\draw [arrow] (step20) -- (end);
	\end{tikzpicture}		\end{tikzpicture}
	</PGFTikZ>		</PGFTikZ>