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	<id>https://wiki.libresilicon.com/index.php?action=history&amp;feed=atom&amp;title=Open_PDKs</id>
	<title>Open PDKs - Revision history</title>
	<link rel="self" type="application/atom+xml" href="https://wiki.libresilicon.com/index.php?action=history&amp;feed=atom&amp;title=Open_PDKs"/>
	<link rel="alternate" type="text/html" href="https://wiki.libresilicon.com/index.php?title=Open_PDKs&amp;action=history"/>
	<updated>2026-04-30T00:41:43Z</updated>
	<subtitle>Revision history for this page on the wiki</subtitle>
	<generator>MediaWiki 1.44.2</generator>
	<entry>
		<id>https://wiki.libresilicon.com/index.php?title=Open_PDKs&amp;diff=419&amp;oldid=prev</id>
		<title>PhilippGuehring: added link</title>
		<link rel="alternate" type="text/html" href="https://wiki.libresilicon.com/index.php?title=Open_PDKs&amp;diff=419&amp;oldid=prev"/>
		<updated>2024-02-06T15:15:07Z</updated>

		<summary type="html">&lt;p&gt;added link&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
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				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 15:15, 6 February 2024&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l12&quot;&gt;Line 12:&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 12:&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;VTT: https://github.com/gdsfactory/vtt&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;VTT: https://github.com/gdsfactory/vtt&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Libresilicon 1um&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Libresilicon 1um &lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;https://libresilicon.com/#whitepaper&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;== MEMS: ==&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;== MEMS: ==&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Science: https://science.xyz/docs/d/mems-tfe/process&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Science: https://science.xyz/docs/d/mems-tfe/process&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>PhilippGuehring</name></author>
	</entry>
	<entry>
		<id>https://wiki.libresilicon.com/index.php?title=Open_PDKs&amp;diff=418&amp;oldid=prev</id>
		<title>PhilippGuehring: Created page with &quot;== CMOS (and variants): == Skywater 130 https://skywater-pdk.readthedocs.io/en/main/  Globalfoundries GF180 https://gf180mcu-pdk.readthedocs.io/en/latest/  IHP https://github.com/IHP-GmbH/IHP-Open-PDK  MinimalFab: https://www.minimalfab.com/update/news_en/226  SiEPIC Ebeam PDK: https://gdsfactory.github.io/ubc  VTT: https://github.com/gdsfactory/vtt  Libresilicon 1um  == MEMS: == Science: https://science.xyz/docs/d/mems-tfe/process&quot;</title>
		<link rel="alternate" type="text/html" href="https://wiki.libresilicon.com/index.php?title=Open_PDKs&amp;diff=418&amp;oldid=prev"/>
		<updated>2024-02-06T15:05:23Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;== CMOS (and variants): == Skywater 130 https://skywater-pdk.readthedocs.io/en/main/  Globalfoundries GF180 https://gf180mcu-pdk.readthedocs.io/en/latest/  IHP https://github.com/IHP-GmbH/IHP-Open-PDK  MinimalFab: https://www.minimalfab.com/update/news_en/226  SiEPIC Ebeam PDK: https://gdsfactory.github.io/ubc  VTT: https://github.com/gdsfactory/vtt  Libresilicon 1um  == MEMS: == Science: https://science.xyz/docs/d/mems-tfe/process&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;== CMOS (and variants): ==&lt;br /&gt;
Skywater 130 https://skywater-pdk.readthedocs.io/en/main/&lt;br /&gt;
&lt;br /&gt;
Globalfoundries GF180 https://gf180mcu-pdk.readthedocs.io/en/latest/&lt;br /&gt;
&lt;br /&gt;
IHP https://github.com/IHP-GmbH/IHP-Open-PDK&lt;br /&gt;
&lt;br /&gt;
MinimalFab: https://www.minimalfab.com/update/news_en/226&lt;br /&gt;
&lt;br /&gt;
SiEPIC Ebeam PDK: https://gdsfactory.github.io/ubc&lt;br /&gt;
&lt;br /&gt;
VTT: https://github.com/gdsfactory/vtt&lt;br /&gt;
&lt;br /&gt;
Libresilicon 1um&lt;br /&gt;
&lt;br /&gt;
== MEMS: ==&lt;br /&gt;
Science: https://science.xyz/docs/d/mems-tfe/process&lt;/div&gt;</summary>
		<author><name>PhilippGuehring</name></author>
	</entry>
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