Hf precursor TDEAH (Hf(NEt2)4): Difference between revisions

Revision as of 13:36, 12 October 2022

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	[https://download.libresilicon.com/papers/HafniumOxide.pdf Japanese paper]		[https://download.libresilicon.com/papers/HafniumOxide.pdf Japanese paper]

	TDEAH.png		[[File:TDEAH.png\|200px]]