Hafnium oxide deposition: Difference between revisions

Latest revision as of 14:59, 10 October 2022

Tetrakis (3-methyl-3-pentoxy) hafnium (IV)

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	[[File:112006029536252-pat00003.png\|200px\|thumb\|~~left~~]]		[[File:112006029536252-pat00003.png\|200px\|thumb\|right\|Tetrakis (3-methyl-3-pentoxy) hafnium (IV)]]