Chemical recipes: Difference between revisions
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==Hafnium oxide== | ==Hafnium oxide== | ||
The chemical recipe and the process for the deposition and cleaning are based on the following publication https://patents.google.com/patent/KR100592793B1/en and this patent | The chemical recipe and the process for the deposition and cleaning are based on the following publication https://patents.google.com/patent/KR100592793B1/en and this patent https://patents.google.com/patent/US7192623B2 | ||
https://patents.google.com/patent/US7192623B2 | |||
The process is enough complex as to justify its own page, which can be found here [[Hafnium oxide deposition]] | The process is enough complex as to justify its own page, which can be found here [[Hafnium oxide deposition]] | ||
Revision as of 14:55, 10 October 2022
Poly silicon
Commonly Silane gas is being used in the industry for forming polysilicon. Unfortunately this gas is highly poisonous and as such unfeasible for small laboratory scale setups. This is why we're collecting alternative recipes here.
Currently we've got the polysilicon R&D challenge#Polysilicon going, for finding alternative recipes to form polysilicon without the need for the highly poisonous silane gas.
Doping
Alternatives to Boron and Phosphorus gas go here.
Hafnium oxide
The chemical recipe and the process for the deposition and cleaning are based on the following publication https://patents.google.com/patent/KR100592793B1/en and this patent https://patents.google.com/patent/US7192623B2
The process is enough complex as to justify its own page, which can be found here Hafnium oxide deposition