Hafnium oxide deposition (CVD)

The base of this chemical recipe and processing is Hafnium-Tetrachloride, as it can be seen in the picture.

Hafnium-Tetrachloride

You might notice that Hafnium-Tetrachloride is a solid crystal at room temperature, which is kind of a problem considering that we wanna use it as a vapor in our CVD furnace, in order to react it with oxide for obtaining a Hafnium-Oxide thin film layer.

Chemical properties of Hafnium-Tetrachloride

Hafnium-Tetrachloride

HfCl₄ can be produced by several related procedures:

• The reaction of carbon tetrachloride and hafnium oxide at above 450 °C;

HfO₂ + 2 CCl₄ → HfCl₄ + 2 COCl₂

• Chlorination of a mixture of HfO₂ and carbon above 600 °C using chlorine gas or sulfur monochloride:

HfO₂ + 2 Cl₂ + C → HfCl₄ + CO₂

• Chlorination of hafnium carbide above 250 °C.

Processing steps

https://patents.google.com/patent/CN100356519C/en