Hf precursor TDEAH (Hf(NEt2)4): Difference between revisions
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[ | This is the structure of the organic precursor for Hafnium oxide deposition in a CVD ([[Hafnium_oxide_deposition_(CVD)]]) | ||
[[File:TDEAH.png|200px]] | [[File:TDEAH.png|200px]] | ||
as described in the following [https://download.libresilicon.com/papers/HafniumOxide.pdf Japanese paper] | |||
Revision as of 13:39, 12 October 2022
This is the structure of the organic precursor for Hafnium oxide deposition in a CVD (Hafnium_oxide_deposition_(CVD))
as described in the following Japanese paper