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- 13:21, 26 September 2025 Leviathan talk contribs created page LibreSilicon 1µm CMOS Process Flow (HKUST NFF) (Created page with "This document outlines the 1µm CMOS manufacturing process designed for the Hong Kong University of Science and Technology (HKUST) Nanoelectronics Fabrication Facility (NFF). It is a '''gate-first''' process utilizing polysilicon for the gate electrode and a shallow trench isolation (STI) approach for device isolation. The process is designed for manufacturing the LibreSilicon standard logic cells and is licensed under the Libre Silicon public license. == General Manuf...") Tag: Visual edit: Switched