Hf precursor TDEAH (Hf(NEt2)4): Difference between revisions

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[https://download.libresilicon.com/papers/HafniumOxide.pdf Japanese paper]
[https://download.libresilicon.com/papers/HafniumOxide.pdf Japanese paper]


TDEAH.png
[[File:TDEAH.png|200px]]

Revision as of 13:36, 12 October 2022