Danube River
Danube River is a tool, which generates you GDS2 files which you then can manufacture with your prototype process flow in order to validate parameters and adjust your recipes until the values are within a desired range.
So far, the only opportunity we had to try the new test layout generator, was with Global Foundries on their 180nm node, of which the result can be seen in the picture below:
GDS2 view
The upper left section in the above image corresponds with the layout extracted from KLayout, when opening up the layout used for the tape-out
Structures
The Danube test wafer has the purpose of allowing to characterize basic analog properties resulting from the manufacturing process flow.
Each of those properties measured can be linked to a specific recipe in the process flow, which allows to fine tune a process and all its process recipes through repeatedly manufacturing and measuring the Danube river layout.
The Danube river contains 3 types of devices, which allows you to determine edge parameters:
- Resistors
- Capacitors
- Transistors
Resistors
Capacitors
Transistors
Measuring method
TODO: Elaborate Kelvin structures